When did michael jackson start with the "Hee Hee's" and the "Hoo Hoo's" and the "Shamon's"?

I know on the off the wall album he did a couple of "Hoo's" then on Thriller there was some "Hee Hee's". On Bad there was the "Ooh's, Hee Hee's, Ow's, and Shamon's. Then on all his other albums he was doin that so when exactly did it start?